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Abstract : |
Distributed manipulation experiments were performed using a massively-parallel, microfabricated actuator array. Anorganic ciliary array of thin- lm polyimide bimorph microactuators exploiting combined thermal and electrostatic control was employed to implement tasklevel, sensorless manipulation strategies for macroscopic objects. The tasks of parts-translation,-rotation,-orientation, and-centering were demonstrated using small integrated circuit (IC) dice. Strategies were programmed in a ne-grained SIMD (single instruction, multiple data) fashion by specifying planar force vector elds. When a part is placed on the array, the programmed vector eld induces a force and moment upon it. The part's equilibrium states may be predicted and cascaded (using a sequence of elds) to bring the part to a desired nal state. Vector elds with and without potential were tested in experiments, and the behavior of parts in the elds was compared with the theory of programmable vector elds. These elds were implemented by actuating the organic cilia in a cyclic, gait-like fashion. Motion in non-principal (e.g. diagonal) directions was e ected byapairwise coupling of the cilia to implement virtual cilia. These experiments suggest that MEMS actuator arrays are useful for parts-orientation,-posing,-transfer,-singulation, and-sorting. 1, |
