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Abstract : |
A method for beam particle: distribution measurements of a microprobe is presented. The proposed method overcomes the disadvantages of the conventional technique of scanning the beam over a metal edge, which is limited to one dimension and possesses statistical uncertainty, The proposed method is based on scanning the beam in two dimensions over a very small aperture (pinhole) located in the image plane and measuring the beam intensity passing through the pinhole as a function of the scan position. Based on the reasonably accurate simulation of an experiment obtained with a pinhole prototype, the simulation program was employed to propose a pinhole design with a lateral resolution sufficient to resolve the particle distribution within a beam spot of 1 mu m in diameter. (C) 1999 Elsevier Science B.V. All rights reserved., |
